Harufumi Hosokawa, Yuki Kawasaki, Yingquan Zheng, Takashi Abe, Masayuki Sohgawa

Improved Reproducibility of Deflection Control Process for Cantilever‐Type MEMS Tactile Sensors

  • Electrical and Electronic Engineering

This paper describes an improved process for controlling the initial deflection structure of cantilever‐type MEMS tactile sensors. By using residual stress, deposition sequence, and metal layer patterns, the initial deflection of the cantilever was successfully aligned to the same initial deflection with micron accuracy and 97% yield in a simpler and easier process than previous processes. This enables a reduction in the number of processes and flexible control of deflection, which is expected to improve yield and shorten fabrication time. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

Need a simple solution for managing your BibTeX entries? Explore CiteDrive!

  • Web-based, modern reference management
  • Collaborate and share with fellow researchers
  • Integration with Overleaf
  • Comprehensive BibTeX/BibLaTeX support
  • Save articles and websites directly from your browser
  • Search for new articles from a database of tens of millions of references
Try out CiteDrive

More from our Archive