Outline
DOI: 10.1039/d3cp02388e ISSN: 1463-9076
Ab initio simulations of ultrashort laser pulse interaction with Cl–Si(100): implications for atomic layer etching
Peizhi Wang, Fengzhou Fang- Physical and Theoretical Chemistry
- General Physics and Astronomy
RTTDDFT-MD simulations reveal the desorption dynamics of SiCl from Cl–Si(100) under ultrafast laser pulses towards a laser-induced atomic layer etching approach.
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