DOI: 10.1116/6.0003149 ISSN: 2166-2746

An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region

I. Silander, J. Zakrisson, M. Zelan, O. Axner
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films
  • Process Chemistry and Technology
  • Instrumentation
  • Electronic, Optical and Magnetic Materials

An updated version of an Invar-based dual Fabry–Perot cavity refractometer utilizing the gas modulation methodology has been characterized with regard to its ability to assess gas pressure in the low pressure regime, defined as the regime in which the instrumentation is mainly limited by the constant term a in the [(a)2+(b×P)2]1/2 expression for the uncertainty. It is first concluded that this ability is predominantly limited by three entities, viz., the empty cavity repeatability, the residual gas pressures in the evacuated (measurement) cavity, and the contamination of the gas residing in the measurement cavity that originates from leaks and outgassing. We then present and utilize methods to separately estimate the uncertainty of the updated refractometer from these entities. It was found that, when utilizing gas modulation cycles of 100 s and when addressing nitrogen, the system can assess pressure in the low pressure regime with an expanded uncertainty (k=2) of 0.75 mPa, mainly limited by the empty cavity repeatability and outgassing of hydrogen. This is more than 1 order of magnitude below the previously assessed low pressure performance of the instrumentation.

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