DOI: 10.1063/5.0173884 ISSN: 0003-6951

A tunable high-Q flexible ferroelectric film capacitor for GHz RF applications

Feilong Mao, Yongqi Hou, Yifan Zhu, Haohan Zeng, Hui Zhang
  • Physics and Astronomy (miscellaneous)

With the development of flexible electronics, flexible tunable capacitors with high dielectric constant, high tunability, and low loss become important components in modern communication. A tunable Ba0.6Sr0.4TiO3 capacitor for radio frequency devices is prepared on a flexible substrate. The capacitor has a dielectric constant greater than 1000, capacitance tunability n exceeding 70%, and minimum loss tangent lower than 0.03 at 500 kHz. The Q factor can be above 103 at the GHz frequency range. These parameter values (especially the Q factor) have been comparable to the rigid substrate tunable capacitor. Meanwhile, the minimum radius of curvature of the flexible tunable capacitor can be 3 mm with stable electrical performances. The flexible tunable capacitor retains its mechanical and electrical stability after 24 000 high-frequency bending cycles, which provides potential uses in bendable, collapsible tunable capacitors at the radio frequency range.

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