DOI: 10.3390/nano13243157 ISSN: 2079-4991

A Design of High-Efficiency: Vertical Accumulation Modulators Based on Silicon Photonics

Zhipeng Zhou, Zean Li, Cheng Qiu, Yongyi Chen, Yingshuai Xu, Xunyu Zhang, Yiman Qiao, Yubing Wang, Lei Liang, Yuxin Lei, Yue Song, Peng Jia, Yugang Zeng, Li Qin, Yongqiang Ning, Lijun Wang
  • General Materials Science
  • General Chemical Engineering

On-chip optical modulators, which are capable of converting electrical signals into optical signals, constitute the foundational components of photonic devices. Photonics modulators exhibiting high modulation efficiency and low insertion loss are highly sought after in numerous critical applications, such as optical phase steering, optical coherent imaging, and optical computing. This paper introduces a novel accumulation-type vertical modulator structure based on a silicon photonics platform. By incorporating a high-K dielectric layer of ZrO2, we have observed an increase in modulation efficiency while maintaining relatively low levels of modulation loss. Through meticulous study and optimization, the simulation results of the final device structure demonstrate a modulation efficiency of 0.16 V·cm, with a mere efficiency–loss product of 8.24 dB·V.

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