DOI: 10.1039/d3tc02084c ISSN:
Room temperature fabrication of highly proton conductive amorphous zirconia-based thin films achieved through precise nanostructure control
Makoto Takayanagi, Takashi Tsuchiya, Daiki Nishioka, Tohru Higuchi, Kazuya Terabe- Materials Chemistry
- General Chemistry
YSZ thin films with controlled microstructure were fabricated without annealing process. The microstructure strongly depended on the oxygen partial pressure during the deposition, and the proton conductivity also varied significantly.