Road to Practical Manufacturing of Nanopattern‐Scaffolded Functional Devices: From Scalable Mechanical Nanopatterning to Multidimensional Integration With Functional Materials

ABSTRACT

Patterned micro‐ and nanostructures can provide versatile active scaffolds for functional devices, often integrating complementary materials, by regulating their arrangements, interfaces, transport pathways, and physicochemical properties. Nanopattern‐scaffolded functional devices, increasingly pursued in that regard, require a practical manufacturing route that combines large‐area micro‐ and nanopatterning with facile integration with functional materials. This review summarizes our studies progressing along such a road in sequence of three platform technologies (PTs), from scalable mechanical patterning (PT‐I) through solution‐processable functional surface architecturing (PT‐II) to device integration with multidimensional nanostructures (PT‐III). PT‐I presents scalable mechanical nanopatterning technologies, beginning with large‐area nanoimprinting by developing a large‐area‐tiled mold and then involving continuous mechanical patterning methods inspired by classic machining principles, including indentation, extrusion, and scribing. PT‐II addresses the low‐temperature solution‐processable architecturing of diverse carbon‐ and metal‐nanostructured functional surfaces, specifically by utilizing ionic metal inks and carbon‐nanotube coatings. PT‐III demonstrates several strategies for nanopattern‐scaffolded integration of functional devices incorporating multidimensional nanomaterials, including solution‐processable, metal‐nanopattern‐directed semiconductor nanowire growth, and nanowire‐interconnected metal‐wire‐patterned electrode and micrograting sidewall‐scaffolded structure. The methods, principles, and ideas presented in this review share and head to a common goal: practical manufacturing of nanostructure‐functionalized devices with minimal reliance upon optical lithography, vacuum processing, and chemical etching.