Quartz‐Supported Suspended Membrane for Ultra‐sensitive Solid‐State Nanopore With Sub‐1 pF Capacitance

ABSTRACT

Solid‐state nanopores utilizing two‐dimensional materials offer great potential with exceptional spatial resolution for single‐molecule analysis, yet their performance is often limited by high parasitic capacitance and/or complex fabrication procedures. Here, we present a simple and cost‐effective fabrication strategy for a quartz‐based nanopore chip that achieves a sub‐1 pF chip capacitance. The device architecture comprises a laser micromachined quartz substrate with a tapered fluidic channel, over which a photoresist membrane is suspended with a sub‐micron aperture to support 2D materials. Electrical impedance measurements and lumped element modeling reveal that the chip capacitance is dominated by the quartz substrate, yielding a value as low as ∼0.8 pF. Consequently, the noise power spectral density (PSD) of the assembled nanopore platform shows a significant suppression of the high‐frequency noise compared to conventional silicon‐based chips. This low‐noise, low‐capacitance supporting structure provides a robust foundation for integrating 2D materials, thereby advancing the development of ultra‐sensitive solid‐state nanopores for next‐generation sequencing and single‐molecule manipulation.