DOI: 10.1039/d6sc03643k ISSN: 2041-6520
PFAS free chemically amplified resists enabled by low activation energy hydrocarbon cage monomers
Yizhou Liu, Matthew D. Summersgill, Han-Hao Cheng, Sharon Chow, Elijah Im, Yining Du, Hui Xing, Sevan D. Houston, Brian Nielsen, Andrew K. Whittaker, Elizabeth H. Krenske, Idriss Blakey, Craig M. WilliamsLarger cage hydrocarbon induced hyperconjugation lowers the energy barrier for resist deprotection ( i.e. , solubility switching), eliminating the need for PFAS-containing PAGs for photoresist design.