Orthorhombic phase stabilization and ferroelectric enhancement in ZrO
                    <sub>2</sub>
                    thin films
                    <i>via</i>
                    stress engineering

doi:10.1039/d6tc01067a

DOI: 10.1039/d6tc01067a ISSN: 2050-7526

Orthorhombic phase stabilization and ferroelectric enhancement in ZrO ₂ thin films via stress engineering

Hao-Nan Liu, Jian-Qing Dai, Guang-Cheng Zhang, Cai-Dong Gu

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Stress engineering enhances the ferroelectricity of ZrO ₂ thin films prepared by chemical solution deposition.

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Orthorhombic phase stabilization and ferroelectric enhancement in ZrO 2 thin films via stress engineering

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Orthorhombic phase stabilization and ferroelectric enhancement in ZrO ₂ thin films via stress engineering