Novel environmentally friendly chemical mechanical polishing for zinc oxide in an alkaline environment using silica and ceria mixed abrasives

doi:10.1039/d6tc00890a

DOI: 10.1039/d6tc00890a ISSN: 2050-7526

Novel environmentally friendly chemical mechanical polishing for zinc oxide in an alkaline environment using silica and ceria mixed abrasives

Xiubin Zhang, Zhenyu Zhang, Xiaoping Wu, Cheng Fan, Bowei Zhang, Yanxun Xiang, Fuzhen Xuan, Xingqiao Deng, Jiaxin Yu

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Zinc oxide (ZnO) is widely used in high-performance semiconductor and optoelectronic devices.

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