Integrating Multi-Level Micro/Nanostructures to Synergistically Regulate Contact Behavior and Mechanical Deformation for Broad-Range High-Sensitivity Pressure Sensors

Abstract

Flexible capacitive pressure sensors hold tremendous promise for human health monitoring, human-machine interfaces, and wearable electronics due to their excellent conformability and high sensitivity. Nevertheless, breaking the inherent trade-off between high sensitivity and a broad detection range remains a challenge. Herein, we rationally design a hierarchical micro/nanostructured capacitive pressure sensor. This architecture strategically integrates a conical microcavity layer to optimize mechanical compressibility, a SiO2 micro/nanosphere layer to regulate interfacial contact behavior, and an electrospun nanofiber network to reinforce structural robustness, working synergistically to achieve superior sensing performance. Empowered by these synergistic components, the sensor exhibits an outstanding comprehensive performance, achieving a high sensitivity of 3.779 kPa–1, a broad sensing range of up to 255 kPa, a rapid response time (48 ms), and remarkable mechanical durability (over 6000 cycles under a high pressure of 150 kPa). Consequently, the sensor demonstrates versatile capabilities across diverse scenarios, including continuous human physiological and kinematic monitoring, non-destructive fruit and vegetable sorting, high-resolution pressure array sensing, and a backpack-integrated posture assessment system. This work establishes a versatile hierarchical design paradigm for next-generation flexible capacitive sensors, paving the way for superior performance and real-world applications in intelligent perception systems.