DOI: 10.1039/d6tc01796g ISSN: 2050-7526
Impact of cumulative thermal budget on the electrical characteristics and stability of 1st-tier IGZO TFTs in all-oxide monolithic 3D integration
Min-Joe Lee, Ji-Won Kang, Sung-Min YoonControlled pre-annealing enables 1st-tier IGZO transistors to withstand subsequent tier fabrication, identifying 200–250 °C as a practical window for performance, stability, and thermal tolerance.