DOI: 10.1063/5.0337549 ISSN: 0003-6951

Homogeneous MoTe2 CMOS inverters enabled by work function-engineered van der Waals contacts

Shiwan Zou, Boyuan Di, Yijia Jiang, Jie Yu, Yuxiang Wang, Liqiang Chen, Shijie Liu, Jintian Li, Ziyi Dong, Haixin Chang, Wenfeng Zhang

We demonstrate that homogeneous MoTe2 complementary metal–oxide–semiconductor (CMOS) inverters can be constructed through a simple work function engineering strategy using van der Waals contacts. Polarity control of MoTe2 transistors is achieved by employing high-work function degenerated semiconductor SnSe2 and low-work function semimetal Bi as source/drain electrodes for p-type and n-type operation, respectively. Both types of transistors operate in enhance-mode and exhibit on/off current ratios exceeding 106. The resulting homogeneous MoTe2 CMOS inverter, incorporating an h-BN flake as the gate dielectric, achieves a high voltage gain of 78 at a supply voltage of 4 V. These results highlight the potential of this simplified device architecture for realizing high-performance homogeneous MoTe2 CMOS logic circuits.

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