High-Resolution Broadband Ptychography with an EUV Continuum

Ptychography implemented with coherent high-harmonic (HHG) sources enables high-resolution, high-fidelity imaging of nanostructures and biosystems. However, when driven by mid-infrared lasers to generate light at higher photon energies, HHG inherently produces a broadband quasi-continuum, which is less suited for coherent imaging compared with a single harmonic order. Consequently, experiments typically select a narrow bandwidth of ≈1%, leaving most of the HHG photons unused, increasing exposure times. In this work, we demonstrate broadband ptychography utilizing an extreme UV (EUV) continuum centered at 92 eV, with a bandwidth of up to 7.9 eV (a relative bandwidth of ~9%). By focusing the HHG beam to a sub-micrometer spot size to relax the temporal coherence constraints, and utilizing a multi-wavelength ptychographic reconstruction algorithm, we achieve a spatial resolution of 42 nm, which is near the diffraction limit of ~30 nm for our setup. To the best of our knowledge, this represents the broadest spectral bandwidth successfully employed to date for EUV ptychography, with the potential to increase the usable photon flux by up to an order of magnitude relative to previous approaches. In the future, broadband soft X-ray ptychography can be used to image hydrated samples around the carbon K-edge and magnetic textures at the L-edges of transition metals.