DOI: 10.1063/5.0336859 ISSN: 0003-6951
High quantum-efficiency InGaAs/InP photodiodes heterogeneously integrated on SiN waveguides
Son P. Le, Taegeon Kim, Kinson Fang, Andreas Beling, Joe C. CampbellThe integration of photodiodes with optical waveguides is increasingly important for photonic integrated circuit development. We report modified uni-traveling-carrier photodiodes heterogeneously integrated onto Si3N4 optical waveguides, achieving quantum efficiencies up to 91% at 1550 nm. The combination of high quantum efficiencies and ultra-low dark currents yields high signal-to-noise ratios over a broad range of optical signal powers.