DOI: 10.1039/d6tc00375c ISSN: 2050-7526
High-performance ITZO thin films: a systematic study of the influence of the sputtering process on the target and the TFT devices
Zhihao Liang, Weijing Wu, Wei Cai, Yonglin Yang, Nan Ji, Honglong Ning, Guoping Su, Han He, Rihui Yao, Junbiao PengInfluence of the sputtering process on the internal composition and defect structure of ITZO films with different thicknesses.