DOI: 10.1116/6.0003489 ISSN: 1055-5269
HAXPES reference spectra of In, Sn, and ITO with Cr Kα excitation
Dong Zheng, Christopher N. Young, William F. StickleHard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.