Growth window and wurtzite phase stability of molecular-beam-epitaxial ScInN thin films with composition-dependent photoluminescence
S. A. Jentsch, M. F. Zscherp, D. Filippozzi, M. Lauer, F. Schäfer, M. Stein, L. Chen, J. M. Waack, F. Meierhofer, C. Margenfeld, A. Waag, P. J. Klar, C. Heiliger, S. Chatterjee, J. SchörmannWe establish the growth window and wurtzite phase stability of plasma-assisted molecular-beam-epitaxial ScInN thin films over a broad composition range. Lower growth temperatures suppress rock salt phase formation and enable wurtzite ScInN without detectable rock salt contributions up to x(Sc) = 0.36. X-ray diffraction reveals systematic composition-dependent changes in phase formation and lattice parameters. We observe a pronounced anisotropic lattice evolution, with the in-plane lattice parameter a showing only a minor dependence on scandium content, whereas a decrease in the out-of-plane lattice parameter c is more pronounced. This trend is consistent with results from density functional theory calculations we performed using the SCAN functional, as well as Raman spectroscopy measurements showing a strong shift of the A1(LO) modes and a much smaller shift of the E2 mode. Photoluminescence is observed across the investigated alloy series, with the maximum emission shifting from 0.85 eV for InN to 2.07 eV for x(Sc) = 0.40. These results establish molecular-beam-epitaxial ScInN as an experimentally accessible alloy system with an extended wurtzite stability range, a composition-dependent optical response, and a nearly constant in-plane lattice parameter enabling heterostructure design with reduced lattice mismatch.