DOI: 10.1039/d6ma01009a ISSN: 2633-5409

Growth of (111)-textured SrTiO 3 thin films on Pt(111)/Al 2 O 3 (1−102) substrates by rf magnetro

Ekaterina Taylor, Ethan R. Cronk, Kalani Perera, Nuri W. Emanetoglu, Nicholas S. Bingham

SrTiO 3 (STO) thin films (20–30 nm) with (111) crystal structure and low roughness can be used as growth templates for complex oxides.

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