Growth and Fabrication of High-Mobility Transparent Conductive Oxides: A Review
Zhibin Liu, Can Han, Shuning Li, Pei Li, Jiejun Pan, Wenjie He, Yinzhi Chen, Xionghui Tan, Pingqi GaoAbstract
Transparent conductive oxides (TCOs) have become key materials in the modern optoelectronic industry due to their excellent comprehensive opto-electrical properties. Rapid advances in related fields demand even higher conductivity and transparency, making high-mobility TCOs essential for overcoming device performance bottlenecks. This review systematically summarizes the research progress on the growth and fabrication of high-mobility TCOs, focusing on three major material systems (In2O3-, ZnO-, and SnO2-based TCOs). Key factors influencing their fabrication are discussed, including doping systems, microstructure control, and deposition techniques. The main challenges for each material system are identified, and potential solutions are proposed. By providing a critical analysis of current limitations and future directions, this review aims to offer theoretical guidance and practical technical pathways for the development of next-generation high-mobility TCO materials.