Formation and Stability of Solid Noses During Float Zone Silicon Growth

ABSTRACT

The formation of solid silicon spikes (noses) during needle‐eye float zone (FZ) silicon growth may, depending on their characteristics, be a cause of process failure. We employ modeling to characterize the stability of noses in various electromagnetic and thermal environments and present a theory of nose formation. The main factors determining nose stability are found to be the magnetic field strength, the induction frequency, the temperature of the environment, and the shape of the nose. The theory shows good agreement with experimental observations and enables a quantitative distinction between stable and disruptive growth regimes.