Outline
DOI: 10.1039/d6ra04171j ISSN: 2046-2069
First-principles evaluation of Janus TiMC MXenes as Cu interconnect barrier layers
Bowen Li, Zhiyong Li, Shuting Wang, Mingpeng Chen, Yanxin Qiao, Yao XiangFirst-principles calculations reveal that Janus MXenes (TiMC) outperform the traditional TaN diffusion barriers in Cu interconnects.
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