DOI: 10.1039/d6ra05343b ISSN: 2046-2069

Evolution mechanism of (100) diamond etch pits and dislocations

Guozhao Ren, Shuai Xu, Feitong Ren, Zichen Zhao, Sijia Hao, Xiaolu Yuan, Liangxian Chen, Jinlong Liu, Junjun Wei, Chengming Li

Single crystal diamond shows great potential for electronic devices, but dislocations and other structural defects remain common, severely limiting device performance.

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