Evaluation methods for MEMS-Based Accelerometer under High-G Conditions

This study presents a MEMS-based piezoresistive high-G accelerometer, designed with a cross-axis sensitivity ratio below 1 % and withstanding up to 200 kG, to precisely measure during impact and penetration of high-velocity projectile. Its high-G performance was investigated through a comprehensive evaluation program consisting of linearity tests, over-shock test, extreme load test and smoothbore gun tests. These investigations successfully confirmed the ability of sensor to shock resistance and sensitivity linearity. The proposed evaluation methods and results are expected to serve as a reference for performance evaluation of high-G accelerometers intended for extreme environment applications.