DOI: 10.1063/10.0044468 ISSN: 1063-777X
Estimation of nano-roughness parameters of a solid substrate using surface electrons over a helium film
V. A. Nikolaenko, S. S. SokolovThe possibility of studying the surface quality of a dielectric substrate by measuring the mobility of surface electrons over a helium film as its thickness varies is analyzed. A device for measuring film thickness, containing a displacer with an electromagnetic drive, is described. The device’s plumb line system ensures an average uniform film thickness. Using the device and mobility measurements, one can estimate the effective roughness scale.