DOI: 10.1039/d6ce00647g ISSN: 1466-8033
Enhancing sp 2 BN film crystallinity via vapor infiltration in microchannels
Alexandre Mounérat, Hervé Plaisantin, Sylvain Jacques, Georges ChollonChemical vapor deposition in microchannels allows us to obtain highly ordered sp 2 -BN films at temperature below 1000 °C. This highlights the significant role of gas infiltration in the enhancement of the BN film crystallinity.