DOI: 10.1039/d6ce00647g ISSN: 1466-8033

Enhancing sp 2 BN film crystallinity via vapor infiltration in microchannels

Alexandre Mounérat, Hervé Plaisantin, Sylvain Jacques, Georges Chollon

Chemical vapor deposition in microchannels allows us to obtain highly ordered sp 2 -BN films at temperature below 1000 °C. This highlights the significant role of gas infiltration in the enhancement of the BN film crystallinity.