Engineering Energy‐Storage Interfaces With Atomic and Molecular Layer Deposition: From Surface Chemistry to Process Design

ABSTRACT

The performance and lifetime of energy‐storage devices are determined at the interfaces between electrodes, electrolytes, and separators, where ion and charge transfer, parasitic reactions, and mechanical degradation originate within nanometers of the surface. Atomic layer deposition (ALD) and molecular layer deposition (MLD) enable precise engineering of these interfaces through self‐limiting surface reactions that produce conformal coatings with controlled thickness and composition, even on porous electrodes. Although ALD surface chemistry is well established on ideal oxide surfaces, energy‐storage materials present chemically and structurally complex surfaces, on which reaction mechanisms, growth per cycle, and coating function can differ. This Review develops a chemistry–process–structure–function framework that connects surface chemistry, precursor reaction pathways, and nucleation behavior with film structure, ionic transport, charge‐transfer kinetics, redox stability, and mechanical response. We examine growth on oxide, sulfide, metal, polymer, and carbon substrates and relate the films to their functions at cathodes, anodes, solid electrolytes, and separators in Li‐based and beyond‐Li batteries. We further assess process scalability in terms of precursor utilization, throughput, and energy consumption, and discuss in situ monitoring, post‐deposition characterization, and full‐cell test conditions needed to validate coating performance. These relationships are summarized as six design rules presented as a decision flow.