DOI: 10.3390/mi14081630 ISSN:
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
Lucia Romano, Konstantins Jefimovs- Electrical and Electronic Engineering
- Mechanical Engineering
- Control and Systems Engineering
Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]