DOI: 10.3390/mi16020189 ISSN: 2072-666X
Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition
Yao-Chuan Tsai, Pin-Chun Huang, Ching-Liang DaiMicroelectromechanical systems (MEMSs) and nanoelectromechanical systems (NEMSs) are revolutionary technologies that merge mechanical and electronic components on microscopic and nanoscopic scales [...]