Dynamic Modeling and Guide Rail Parameter Optimization of a Four-Axis Precision Motion Stage Based on the Generalized Receptance Coupling Substructure Analysis

The stable and reliable operation of precision motion stages constitutes a core prerequisite for accurate machining and operation in high-end equipment. Aiming at solving the problems of insufficient dynamic modeling accuracy, difficulty in achieving the precise prediction of guide rail parameters, and inadequate system performance optimization, this paper takes a four-axis precision motion stage as the research object and conducts a systematic study on dynamic modeling, guide rail parameter prediction, and system performance optimization. Verification results show that the maximum errors of natural frequencies in the x, y, z, and β directions are 1.3%, 4%, 5%, and 1%, respectively. The predicted results of the model are in good agreement with the experimental data, based on the dynamic model of the precision motion stage and the prediction model of guide rail dynamic parameters. On this basis, the guide rail-related parameters were optimized. After optimization, compared with the original state, the performance in the z and β directions was significantly improved: the natural frequency in the z direction was increased from 57 Hz to 70 Hz, and the natural frequency in the β direction was increased from 110 Hz to 154 Hz. This improvement enhances the overall anti-vibration capability at low frequencies and effectively ensures the stability and reliability of the precision motion stage during operation. The method used in this study has generality and transferability, which can provide a theoretical basis and technical support for the dynamic design and parameter optimization of various precision motion systems.