Demonstration of Large Area All‐Semiconductor Photonic Crystal Surface Emitting Lasers

ABSTRACT

We report progress in the fabrication and electro‐optical operation of an all‐semiconductor based photonic crystal (PC) surface‐emitting laser (PCSEL). The device incorporates a lattice of stretched isosceles triangles (SITs) that defines the laser cavity, enabling strong in‐plane feedback and efficient surface emission. Precise patterning of the PC layer, combined with optimized dry etching and epitaxial growth developed in this work, ensures uniform mode confinement. The resulting PCSEL exhibited an output power of 235 mW at an emission wavelength of 1065 nm under pulsed operation at 15°C.