DOI: 10.1039/d6ce00281a ISSN: 1466-8033
Attention-driven deep neural network for impurity concentration prediction in AlN via absorption spectroscopy
Jialu Wang, Huimin Lu, Zeren Wang, Jiahao Chen, Chuhao Yang, Yunqi Liu, Huangshu Zhang, Yuheng Du, Hailong Wei, Jiacheng Zhong, Jiejun Wu, Tongjun YuOverall workflow of the ATT-PSO-DNN model for impurity concentration prediction and spectral feature attribution.