Application Performance of PTFE Membrane-Based Filter Cartridges for Electronic-Grade Acid Purification
Weijie Zhang, Wenjie Cong, Jinyang Cai, Shuainan Xu, Hongjia Zhou, Qun Zhou, Chaonan Xu, Shasha Feng, Zhaoxiang Zhong, Weihong XingAbstract
In this work, an application-oriented evaluation of an independently developed PTFE/PFA filter cartridge was conducted for electronic-grade sulfuric acid purification. The filter demonstrated good stability in acid after 28 days of immersion. The pore size expansion was restricted within 30%, accompanied by a negligible reduction in porosity (<3%). After a week of ultrasonic pretreatment in acid, the metal impurity content of the filter cartridge material can be reduced to below 5 ppb. After 64 h of cyclic filtration, the system achieved absolute retention of particles (≥1000 nm) and maintained separation efficiencies exceeding 99% for both 300 nm (17.1 particles/mL) and 500 nm (2.0 particles/mL) particulates, ultimately yielding purified sulfuric acid with particle counts meeting the international SEMI G3 grade. These findings substantiate the chemical stability and ultralow leaching characteristics of the self-fabricated PTFE cartridge, confirming its suitability for high-purity chemical filtration.