DOI: 10.4071/001c.94848 ISSN: 2380-4505

Application of Reactive Bonding Methods on LTCC Substrates

Erik Wiss, Alexander Schulz, Adam Yuile, Jens Mueller, Steffen Wiese
  • General Medicine

This paper discusses the application of reactive bonding for the area of Low Temperature Cofired Ceramics (LTCC) assemblies. The goal is to reduce the thermal-mechanical stresses during soldering by transferring heat only locally to the solder joints without heating the entire component. Such a reactive multilayer system (RMS) consists of alternating nanolayers (10-300 nm) of at least two metal components which produce an exothermal reaction after ignition. Although the deposition of an RMS is established on silicon substrates for the use in micro-electromechanical systems (MEMS), it is very challenging to create them on LTCC substrates. One of the main obstacles is to overcome all issues connected with the significant roughness, becasue it is not an optimum territory to deposit nanolayers. In this paper, different methods like chemical mechanical polishing (CMP) and laser ablation, to modify the surface morphology, are presented. A direct relation between the morphology and the exothermal reaction can be observed. In addition, 3-D Computational Fluid Dynamics (CFD) simulations were conducted to analyze the process in more detail. These simulations make use of a shoebox model with different layers and an adjustable user-defined function for the heat release of the RMS to adapt the reaction front velocity and the combustion temperature to the experimental values.

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