DOI: 10.1002/sdtp.16789 ISSN:
85‐1: Ultrahigh‐Resolution Corrugated Silicon Nitride Masks for Direct Patterning of OLED Microdisplays
Shou-Cheng Dong, Jiye Yang, Sunbin Deng, Bryan Siu Ting Tam, Jingwen Yao, Ching W. Tang- General Medicine
Corrugated silicon nitride masks (SiNMs) of 2000 ppi are developed to reduce the shadowing effect in direct patterning of high‐resolution, RGB side‐by‐side OLED microdisplays. Periodic corrugations in the free‐standing silicon nitride membrane elevate the through‐apertures and reduce the gap between the mask and the substrate.