DOI: 10.1002/sdtp.16764 ISSN:
78‐2: A flat‐panel‐display compatible ultrasound platform
Epimitheas Georgitzikis, Pieter Gijsenbergh, Jeremy Segers, Dominika Wysocka, John Viaene, Tibor Kuna, Robert Ukropec, FloriansDe Roose, Raf Appeltans, Milind Pandit, Tomoatsu Kinoshita, Steve Stoffels, David Cheyns- General Medicine
We present a thin‐film piezoelectric micromachined ultrasonic transducer (PMUT) technology compatible with flat‐panel manufacturing methods. Using the developed flow which is based on a low temperature AlScN piezoelectric layer, we fabricate large area 48x48 element PMUT arrays on glass. Beam steering and ultrasound medical imaging are demonstrated. The developed transducer technology can be combined with a TFT backplane and has the potential of direct integration on top of display size glass sheets, expanding the boundaries of ultrasound application domains.