DOI: 10.1002/sdtp.16726 ISSN:

67‐4: Uniform Polycrystalline Si Films Obtained via the Fiber‐laser‐based Spot‐Beam‐Annealing Method

Jayoung Park, Ruobing Song, Nikita Lisenko, Bonan Shen, Alexander Killips, Adithya P. Nair, James S. Im
  • General Medicine

Experimental findings are presented on the polycrystalline Si films produced using fiber‐laser‐based Spot‐Beam Annealing (SBA) method. Quantitative analysis was performed based on the results obtained from TEM and other microstructure characterization tools. Comparison is made to the films generated using a state‐of‐the‐art manufacturing ELA system under optimal processing conditions.

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