DOI: 10.1002/sdtp.16724 ISSN:
67‐2: Adoption of Blue Light Semiconductor Laser Diode (BLDA) in LTPS TFT Manufacturing
Y. Yang, M. Kinoshita, T. Okuno, M. Hashizume, K. Saito, T. Sawai, J. Gotoh, S. Sugimoto- General Medicine
We have investigated adoption of CW blue laser diode annealing (BLDA) in manufacturing process of LTPS TFT backplane. Our experiments have shown that except crystallization annealing, BLDA can be adopted in dehydrogenation of precursor amorphous silicon film, and also can be used in the activation after ion implantation. By using BLDA dehydrogenation of H2 content as high as 20% can be implemented. In the activation, BLDA can achieve surface resistance much lower than using conventional RTA.