DOI: 10.1002/sdtp.16220 ISSN: 0097-966X
6.1: Adoption of Silicon Blue Semiconductor Laser Diode in Dehydrogenation of LTPS TFT Manufacturing
Y. Yang, M. Kinoshita, T. Okuno, M. Hashizume, K. Saito, T. Sawai, J. Gotoh, S. Sugimoto- General Medicine
We have investigated de‐hydrogenation of amorphous film using CW blue light semiconductor laser annealing (BLDA). Dehydrogenation of hydrogen content as high as 20% can be implemented by using BLDA. This technology can be applied for large substrate beyond G8. We will report related experiment results in this paper.