DOI: 10.1002/sdtp.17657 ISSN: 0097-966X

60‐3: CMOS Compatible microLED Epitaxy for Display Applications

Lewis Kastein, Hugues Marchand, Mark J. Furlong, Rodney Pelzel

Results from AlGaInP (red) microLED devices deposited by MOCVD on 200 mm Ge substrates will be presented. As a potential replacement for GaAs, Ge offers advantages which include ultra low levels of bulk defectivity, superior mechanical strength and cost competitiveness versus incumbent substrate technologies. Additionally, Ge is a CMOS fab compatible substrate which is a key to accessing high volume manufacturing within existing Si foundries, 300 mm being a future key enabler

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