DOI: 10.1039/d6nr01275b ISSN: 2040-3364
3D nanoscale design of oxide morphology, anisotropy and chemical heterogeneity by glancing angle physical vapor deposition
Huiming Guo, Xin Wang, Mingjie Xu, Zhaofu Chen, Chaojie Du, Jenna L. Wardini, Benjamin Lam, Jason Luong, Toshihiro Aoki, Xiaoqing Pan, William J. BowmanGlancing-angle pulsed laser deposition enables the synthesis of textured YSZ zig-zag films with tunable 3D morphology, porosity, and chemistry.